產(chǎn)品[
分批式凈化系統(tǒng)
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產(chǎn)品名稱(chēng):
分批式凈化系統(tǒng)
產(chǎn)品型號(hào):
CBS
產(chǎn)品展商:
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分批式凈化系統(tǒng)
The original sealed structure has enabled the atmospheric process.
With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
分批式凈化系統(tǒng)的詳細(xì)介紹
分批式凈化系統(tǒng)：
The original sealed structure has enabled the atmospheric process.
With the ultra high HEPA filter adopted,the maximum available temperature at 500℃ has been achieved.
Cycle time reduction is possible by oven rapid cooling system and/or speedy substrate-transfer.
| Available glass size | | ~W730×L920mm |
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| Temperature range | 80~500℃ |
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| Temperature uniformity | ±5℃ |
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| Cleanliness | Class 10 (0.3μm) |
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| Applications | | A wide variety of Annealing of LTPS & TFT |
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