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單片IR式凈化燒成爐
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產(chǎn)品名稱:
單片IR式凈化燒成爐
產(chǎn)品型號(hào):
CCBS-IR
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡(jiǎn)單介紹
單片IR式凈化燒成爐
Clean structure with no dust caused by itself
Far-infrared radiation(IR) heating system has been adopted.
單片IR式凈化燒成爐的詳細(xì)介紹
單片IR式凈化燒成爐：
Clean structure with no dust caused by itself
Far-infrared radiation(IR) heating system has been adopted.
The process with high efficiency is available for various kinds of the film thickness.
The IR panel heater with excellent temperature uniformity has been adopted.
The uniform heating is available for such a large substrate as the 10th Generation.
By introducing N2 gas into the oven, it is available to have a heating process under low Oxygen(O2) density.
| Available glass size | | ~W3000×L3200mm |
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| Temperature range | 80~250℃ |
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| Temperature uniformity | ±3℃ |
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| Cleanliness | Class 10 (0.3μm) |
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| Applications | | Baking of Polyimide coating, Annealing,
Baking of passivation film, Seal main curing/pre curing |
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