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單片熱風(fēng)式凈化燒成爐
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產(chǎn)品名稱:
單片熱風(fēng)式凈化燒成爐
產(chǎn)品型號(hào):
CCBS
產(chǎn)品展商:
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簡(jiǎn)單介紹
單片熱風(fēng)式凈化燒成爐
High productivity with narrowed rack pitch in oven
High clean and damage free
單片熱風(fēng)式凈化燒成爐的詳細(xì)介紹
單片熱風(fēng)式凈化燒成爐：
High productivity with narrowed rack pitch in oven
High clean and damage free
Simplified structure of the equipment, high uptime, and energy saving with the newly developed heat reuse unit
The flexible layout is available with such function units as the single substrate transfer type, and/or the cooling rack.
It is suited for every process of substrates such as sampling some of them after baking and/or skipping the baking process etc.
Our original expertise has resolved such a process to generate sublimation as post baking of the photo resist.
| Available glass size | | ~W3000×L3200mm |
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| Temperature range | 80~250℃ |
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| Temperature uniformity | ±3℃ |
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| Cleanliness | Class 10 (0.3μm) |
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| Applications | | Post baking of color filter resist, Annealing,
Seal main curing/pre curing, Baking of polyimide coating |
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