產品[
日本YAMATO等離子清洗機V1500X
]資料
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產品名稱:
日本YAMATO等離子清洗機V1500X
產品型號:
V1500X
產品展商:
YAMATO
產品文檔:
無相關文檔
簡單介紹
日本YAMATO等離子清洗機V1500X
大型等離子清洗機V1500X
在產品內容中有關于日本YAMATO等離子清洗機V1500X的詳細介紹。
日本YAMATO等離子清洗機V1500X 的詳細介紹
日本YAMATO等離子清洗機V1500X：
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V1500X
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RIE / DP mode selectable
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Aluminum chamber
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For Magazine CSP/BGA
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LCD Touch panel operation
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Easy to set upparameterandoperation
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Built in safetyfunctionwithEmergency stop switch
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Specifications
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Model
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V1500X
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Plasmamethod
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RIE?DPmode
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Electrode
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Parallelflatstageplate
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Electrodematerial
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SUS-304
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Chambertemperature
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Digitaldisplay
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RFgenerator
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100~1500W
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Oscillation
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13.56MHz
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Controlsystem
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LCDTouchpanelwith PLC
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Tuningmethod
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AutomaticandManual
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Timer
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1sec-9H59min59sec
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Chambersize
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(W)600×(D)550×(H)600mm
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Stage size
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(W)460×(D)400mm
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Chambermaterial
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Aluminum
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Reactiongas
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O2,Ar,CF4
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Purge gas
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N2orDryair
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Flow meter
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Mass flowcontrol2line
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Vacuumpump
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1,400L/min
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Emergencystopswitch
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Pushtypeswitch
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Gas port
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2 pc(1/4"SUSswage- lock)
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Purge port
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1pc(1/4"SUSswage- lock)
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Vacuumport
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1pc(SUSNW40)
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Externaldimension
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(W)900×(D)1,000×(H)1,700mm
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Powersupply
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AC200/220/380V3phase 25A
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Weight
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Approx.300kg
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