產(chǎn)品[
日本YAMATO等離子清洗機(jī)PR300/301
]資料
如果您對(duì)該產(chǎn)品感興趣的話,可以
產(chǎn)品名稱:
日本YAMATO等離子清洗機(jī)PR300/301
產(chǎn)品型號(hào):
PR300/PR301
產(chǎn)品展商:
YAMATO
產(chǎn)品文檔:
無(wú)相關(guān)文檔
簡(jiǎn)單介紹
日本YAMATO等離子清洗機(jī)PR300/301
小型等離子清洗機(jī)PR300/PR301，廣泛被應(yīng)用在半導(dǎo)體材料的灰化、蝕刻、干式清洗等方面，外形小巧，價(jià)格經(jīng)濟(jì)、
日本YAMATO等離子清洗機(jī)PR300/301的詳細(xì)介紹
日本YAMATO等離子清洗機(jī)PR300/301：
|
Low Temperature Asher
|
|
PR300/PR301
|
|
Model
|
|
300
|
301
|
|
Method
|
Barrel type of DP
DP : direct plasma
|
|
High-frequency Output
|
|
Max.300W
|
|
Oscillating Frequency
|
|
13.56MHz
|
|
Reaction Chamber
|
?64×160mm
3 chambers
|
?118×160mm
1 chamber
|
|
The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.
-
Three 64mm diameterchambersareincluded. (PR300)
-
The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.
-
One 118mm diameter largechamberisaccommodated.
|
 The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.
|
 Reaction Chamber
|
|
|
|
Control Panel
|
|
|
|
|
Operation Flowchart
|
|
|
Piping System Diagram (PR300)
|
|
|
Specifications
|
|
Model
|
PR300
|
PR301
|
 Method
|
Barrel type of direct plasma
|
|
Controlpart
|
|
Highfrequency output
|
300Wvariable (100W×3 chambers)
|
|
Oscillating frequency
|
13.56MHz
|
|
Outputimpedance
|
50Ω
|
|
Tuningmethod
|
Manual biaxial tuning method
|
|
Instrument
|
Output watt meter (0 to 300W)
Reflected wave watt meter (0 to 100W)
Vacuum gauge, bourdon's tube type
Flow meter, needle valve integrated type, 1 set
|
|
Timer
|
0.1sec. to 999h
|
|
Gasinlet
|
1/4"stainless steel
|
|
Powersource (50/60Hz)
|
AC100/220V, single phase, 1 kVA
|
|
Reactionpart
|
|
Reactionchamber
|
Made ofsuperhardglass, ?64×160mm×3 chanbers
|
Madeofpyrexglass, ?118×160mm
|
|
Electrodestructure
|
Condenser type, 2-way split
|
|
Controlsystem
|
Autopressure reduction, auto leak valve
|
|
Pipingmaterial
|
Stailesssteel,Teflon, Copper and Brass
|
Stainlesssteel,Teflon
|
|
Externaldimensions(W×D×Hmm)
|
438×520×556
|
438×520×656
|
|
Weight
|
Approx.38kg
|
Approx. kg
|
|
StandardAccessories
|
|
|
-
Vacuum grease :1 container
-
O-ring for reactionchamber:6pcs.
-
Sample dish (large andsmall):each4sets
-
Lid for reactionchamber:4sets
-
Adapter for ground:1pc.
|
|
OptionalAccessories
|
|
Sample dish(large) Sample dish (small) Sample shelf Stand
|
|