產(chǎn)品[
日本YAMATO等離子清洗機(jī)PR1000
]資料
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產(chǎn)品名稱:
日本YAMATO等離子清洗機(jī)PR1000
產(chǎn)品型號:
PR1000
產(chǎn)品展商:
YAMATO
產(chǎn)品文檔:
無相關(guān)文檔
簡單介紹
日本YAMATO等離子清洗機(jī)PR1000
中型等離子清洗機(jī)PR1000
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日本YAMATO等離子清洗機(jī)PR1000的詳細(xì)介紹
日本YAMATO等離子清洗機(jī)PR1000:
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Plasma Mode
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DP
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DP:DirectPlasma
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Radio-FrequencyOutput
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10to1000W
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Oscillating Frequency
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13.56MHz
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ChamberSize(mm)
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?300X500D
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Barreledtypelargeglass chamber
EquipmentSummary
ThisPlasma cleaner is made up composed ofasfollows;
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Reaction chamber
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Matching box fortakingadjustbetween
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load and RF power
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Reaction gasflowsystem(CF4 and O2)
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PLC controllerwithTouchpanel
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Radio-frequencypowersupply(RF)
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Vacuum pump
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Purge gas system (N2)
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Specifications
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Model
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PR-1000
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 MainUnit
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Chambersize
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?300×500(D)mm
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Chambermethod
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Quartzglass
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Electrode
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Condenser(4division)
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Plasmamode
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DP mode
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Vacuumgauge
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Capacitancemanometer T
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Reactiongas system
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wosystem(CF4, O2)
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Maincontroller
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PLCcontroller
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Display
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LCDcolordisplayand Touch panel (5.7 inch)
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Door
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Manualopen,swingtype
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ExternalDimension
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700(W)×820(D)×1600(H)mm
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Radio-FrequencyPower Supply
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Inputvoltage
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AC200V8A50/60Hz
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Radio-frequency output power
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10 to1000W
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Referenceoscillator
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Quartzoscillator
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Oscillating frequency
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13.56MHz
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Outputsetting system
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Digitalsetting
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Matchingadjustment
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Automatictuning
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VacuumPump
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Displacement
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670L/min.
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Inputpower supply
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3 phaseAC200V11A50/60Hz
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InletConfiguration
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NW40
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OutletConfiguration
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NW40
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GasSystem
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Purgegas
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N2
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Reactiongas control
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Massflowcontroller CF4 (F.S.300sccm)
O2 (F.S.300sccm)
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 System Protectionof Equipment
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Protect over current,Builtinprotect over current of Vacuum pump, RF power supplyandmainunit
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Protect quartzoscillator,Whenmatching unit have miss matching, Automatic RF powerdownandprotect quartz oscillator
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Door panel inter lock, Builtininterlock switch
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External coversafetylockswitch
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Emergency stop switch
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SystemProtections by Software in PLC
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When occurredfollowingconditions,Equipment stop and Error will display.
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In case of RF power is outofsettingvalue.
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In case of gas flow (CF4, O2) is out of setting flow rate.
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In case of RFW powerisoverpermission value.
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In case of Vacuum pressuredoesnotreach within setting time.
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After finish plasmaprocess,chamberdoes not become atmosphere.
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Utility
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Electricpower supply
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3 phaseAC380V20A50/60Hz (Total system) with down transformer
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CF4 gas
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0.15to0.25Mpa
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O2 gas
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0.15to0.25Mpa
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PressureAir
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0.4 to0.6Mpafordriving air valve
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Connectingsize
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1/4swagelok
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