產(chǎn)品[
感應(yīng)加熱式高速升降溫爐
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產(chǎn)品名稱(chēng):
感應(yīng)加熱式高速升降溫爐
產(chǎn)品型號(hào):
RLA-1200
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡(jiǎn)單介紹
感應(yīng)加熱式高速升降溫爐4 to 8 inch wafer size is available
Low cost system by manual susceptor transfer
Upper & lower cross lamp structure and soaking furnace improved the uniformity of in-plane temperature
感應(yīng)加熱式高速升降溫爐的詳細(xì)介紹
感應(yīng)加熱式高速升降溫爐：
4 to 8 inch wafer size is available
Low cost system by manual susceptor transfer
Upper & lower cross lamp structure and soaking furnace improved the uniformity of in-plane temperature
Vacuum designed quartz tube enables accurate gas substitution and process at vacuum pressure
Equipped with operator friendly high performance control system
| Outer dimension | | W1300×D1300×H1850mm |
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| Operation temperature | 400 to 1200℃ |
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| Heat up rate | Max.200℃/sec |
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| Lamp layout | Upper & lower cross lamp arrays |
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| Number of control zone | 6 |
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| Wafer size | 4 to 8 inch |
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| Wafer transfer | manual |
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| Controller | Model RSC 1000 |
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| Option | Vacuum system, Clean bench |
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