產(chǎn)品[
感應(yīng)加熱式高速升降溫爐
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產(chǎn)品名稱:
感應(yīng)加熱式高速升降溫爐
產(chǎn)品型號(hào):
RLA-3100
產(chǎn)品展商:
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產(chǎn)品文檔:
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簡(jiǎn)單介紹
感應(yīng)加熱式高速升降溫爐4 to 8 inch wafer size is available
Multi axis clean robot enables high speed and accurate wafer transfer
Max 50 wafers continuous processing is available
感應(yīng)加熱式高速升降溫爐的詳細(xì)介紹
感應(yīng)加熱式高速升降溫爐：
4 to 8 inch wafer size is available
Multi axis clean robot enables high speed and accurate wafer transfer
Max 50 wafers continuous processing is available
Equipped with operator friendly high performance control system
Vacuum designed quartz tube enables accurate gas substitution and process at vacuum pressure
| Outer dimension | | W900×D1850×H2500mm |
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| Operation temperature | 400 to 1200℃ |
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| Heat up rate | Max.200℃/sec |
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| Lamp layout | Upper & lower cross lamp arrays |
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| Number of control zone | 6 |
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| Wafer size | 4 to 8 inch |
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| I/O port | 2 |
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| Wafer transfer | single wafer / multi-axis clean robot |
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| Controller | Model RSC1000 |
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| Option | Vacuum system, HOST communication(HSMS/GEM) |
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