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感應(yīng)加熱式高速升降溫爐
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產(chǎn)品名稱:
感應(yīng)加熱式高速升降溫爐
產(chǎn)品型號(hào):
RLA-3300
產(chǎn)品展商:
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簡(jiǎn)單介紹
感應(yīng)加熱式高速升降溫爐Low cost performance by limited function
Upper cross lamp structure and zone segmentation improved the uniformity of in-plane temperature
感應(yīng)加熱式高速升降溫爐的詳細(xì)介紹
感應(yīng)加熱式高速升降溫爐：
Low cost performance by limited function
Upper cross lamp structure and zone segmentation improved the uniformity of in-plane temperature
Wafer relation system to improve the uniformity of in-place temperature
Multi axis clean robot enables high speed and accurate wafer transfer
Equipped with operator friendly high performance control system
| Outer dimension | | W1500×D2300×H2080mm |
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| Operation temperature | 400 to 500℃ |
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| Heat up rate | Max.250℃/sec |
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| Lamp layout | Upper cross lamp arrays |
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| Number of control zone | 22 |
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| Wafer size | 300mm |
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| I/O port | 2 |
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| Wafer transfer | single wafer / multi-axis clean robot |
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| Controller | Model RSC1000 |
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| Option | HOST communication(GEM300) |
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