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R&D, 少量生產(chǎn)用立式爐
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產(chǎn)品名稱:
R&D, 少量生產(chǎn)用立式爐
產(chǎn)品型號:
VF-1000
產(chǎn)品展商:
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簡單介紹
R&D, 少量生產(chǎn)用立式爐High performance processing for R&D
Mini Batch, max 25 wafers batch processing
2 to 8 inch and 300mm wafer size are available
R&D, 少量生產(chǎn)用立式爐的詳細介紹
R&D, 少量生產(chǎn)用立式爐：
High performance processing for R&D
Mini Batch, max 25 wafers batch processing
2 to 8 inch and 300mm wafer size are available
Equipped with LGO heater to realize high temperature performance as mass-production equipment
Equipped with limited function simple control system
| Outer dimension | | W1500×D1000×H2100mm |
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| Heater | LGO heater |
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| Flat zone length | 160 to 250mm |
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| Wafer size | to 8inch |
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| Batch size | to 25wafers |
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| Controller | Model 880 |
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| Option | Forced-cooling system, N2 load lock,
25 to 150 wafers of processing (VF-2000) |
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